Filson
Semiconductor Gas Filters

Filson: Your Premier Semiconductor Gas Filters Choice in China

Since the semiconductor manufacturing process becomes complex today, the gas filtration requirements are more and more strict. However, Filson semiconductor gas filters are ideal products engineered to purify gas used in the semiconductor industry and further improve the device yields.

Thanks to the latest sintering technology and advanced manufacturing equipment, Filson is able to produce the desired semiconductor gas filters for our customers all over the world. And no matter where you are, we can offer the same and responsible service for you.

You can totally believe in Filson for we have concentrated on filtration for more than 20 years. Our professional engineering team is willing to design a special semiconductor gas filter for your application that is highly effective as well as cost-efficient.

Filson Semiconductor Gas Filters

0.0015μm Filter
Filson designs and manufactures versatile 0.0015µm gas filter for semiconductor industry. To maintain the high efficiency of the final device, the gas should be filtered before using, though it has the high purity already.
Semiconductor Metal Filter
Filson semiconductor metal filter can be made of various high grade metal materials including stainless steel ( 316/316L ), nickel and Hastelloy. It is customizable according to your requirements, just contact us for more details.
Gas Purifiers for Semiconductor
Filson constructs gas purifiers or gas purifier filters for semiconductor industry. With high filtration efficiency down to 0.0015µm, Filson gas purifier is of great significance in improving the device yields and quality.
Replacement High Purity Gas Filters
Except for the standard type and custom type products, Filson also provides replacement high purity gas filters for the leading brands in the existing market, such as Mott high purity gas filters and ultra high purity gas filters.

Why Choose Filson Semiconductor Gas Filters

Filson offers custom solutions for your applications: To effectively compete and win a stable status in the world market, Filson remains highly focused on the solutions designed for the semiconductor industry. To achieve the target purpose, custom filters are provided for you to ensure the good condition of your device.

Filson regards quality as the core factor of our business: Filson manufactures the semiconductor gas filter in the highest quality to meet the required efficiency and service life. We have ISO 9001 certification and insist on the highest standards at all times to fulfill the order.

Filson is always ready to face your next challenge: Due to the industry requirements, it must have strict control in gas filtration and gas flow at each step of the process. Though it may be not easy to solve all your problems in the semiconductor industry, Filson would like to give it a try.

Filson provides fast and safe delivery: Filson exports semiconductor gas filters to the whole world and more than 30 countries establish a cooperation relationship with us to ensure the performance of their products and the quality of their services. So you can fully trust us about the delivery.

Filson Semiconductor Gas Filter Drawing

Semiconductor Gas Filters Catalog Cover

Filson: Excellent Semiconductor Gas Filters Increasing Your Yields

Filson semiconductor gas filters are preferred products applied to the semiconductor industry. It not only purifies the gas passing through the system but also effectively protects the critical components in semiconductor gas distribution systems.

Sintered Stainless Steel Filter for Semiconductor

Sintered Stainless Steel Filter for Semiconductor

Filson semiconductor gas filters are also called semiconductor metal filters for all our products are made of metals. The most frequently used materials are stainless steel, usually 316L, nickel, and Hastelloy to meet the demanding requirements.

Compared to other common semiconductor gas filters in the market, Filson metal filters are more durable. They have higher corrosion resistance and can withstand thermal conditions up to 450℃.

In addition, experiencing a precisely controlled sintering process, Filson semiconductor gas filter has higher filtration efficiency, and as a result, it can easily remove a particle as small as 0.0015 µm which is a big progress infiltration field.

Semiconductor Processing Using Gas Filters

Semiconductor Processing Using Gas Filters

Another advantage brought by the Filson semiconductor gas filter is that it definitely won’t cause secondary pollution to the gas. Unlike nylon, PTFE or nanospun polypro gas filter for semiconductors, these sintered metal gas filters from Filson have no risk of powder or particle drop which may lead to other problems in the manufacturing process.

There are several forms of contaminants existing in bulk and specialty gas supplies, they are particulates, molecular contaminants, and even so-called historically benign contaminants. Using Filson quality semiconductor gas filters, they are quite easy to deal with.

IT classify the contaminants further, in general, they include but are not limited to moisture, acids, bases, refractory compound, and organic molecules. Of course, the contaminants can be generated during the working process.

Helium Gas Purification System

Helium Gas Purification System

For example, if introducing oxygen ( O2 ) unintentionally during the silicon ( Si ) ingot growth process, silicon dioxide ( SiO2 ) will be produced and its deposition will cause defects before wafer processing even begins. So it is necessary to equip a Filson semiconductor gas filter in the gas distribution path.

The two basic gas filtration and purification methods of Filson semiconductor gas filter are physisorption and chemisorption. The former is mainly to remove H2O and hydrocarbons and the latter is mainly to remove CO, O2, and other reactive oxides.

Filson semiconductor gas filters are all formed in a rather clean environment to make sure the quality of the final product. And under the support of particle-free, chemically clean, organic free handling and bagging, Filson semiconductor filters are proved to be used in the most demanding microelectronics applications.

Purification for Ultra High Purity Gas Delivery System

Purification for Ultra High Purity Gas Delivery System

To reach and even exceed the high purity gas handling filtration requirements for the semiconductor industry, Filson semiconductor gas filters are rigorously tested before leaving the factory to ensure high filtration efficiency, precise flow control, and operational safety requirements.

What’s more, Filson provides a full set of semiconductor gas filters including the filter itself and filter housing. To guarantee the safety of operation and filtration effect, the filter housings are 100% leak-checked. Thus, you can feel free to use our products.

Nowadays, the semiconductor industry ( chip factory ) is highly critical of the cleanliness of the gas in the production environment and has the most demanding requirements for gas filters. Dust stuck to an integrated circuit may cause circuit breaks, short circuits and directly affect the yield of products. But no matter how difficult it is, the Filson semiconductor gas filter is here to help.

After decades of exploration, the Filson semiconductor gas filter is mature enough to handle most of your problems. If you are looking for a suitable device for your application, do not hesitate to contact us today.

We are eager to receive from you and become your next semiconductor partner!

Filson Semiconductor Gas Filters Function:

  • Filter process gas to ensure the final quality of the product
  • Protect mass flow controllers, regulators, and valves in the system
  • Increase device yields of the semiconductor industry
  • Reduce gas-related defects for higher efficiency
  • Withstand high pressure, temperature, and corrosion
  • Prolong the life of equipment in the whole gas delivery system
  • Maximize filter surface area to optimize particle collection potential

Teflon Filter vs Sintered Metal Filter

Teflon Filter vs Sintered Metal Filter

Filson Semiconductor Gas Filters Feature:

  • Customized media tailored to filter a variety of gases
  • Reliable industry-leading filter quality assurance
  • Reduced outgassing and particle impurities for higher yields
  • Uniform pore distribution due to advanced sintering technology
  • Precise micron rating control for high filtration efficiency
  • Higher flow rates and longer service life
  • Good mechanical strength to resist high pressure
  • Excellent temperature and corrosion resistance

Filson Semiconductor Gas Filters Specification:

  • Construction material: stainless steel, nickel, Hastelloy, other metals, and alloys on request
  • Maximum working temperature: up to 450°C
  • Maximum operating pressure: 3750 PSI ( 258 bar )
  • Maximum differential pressure: 1000 PSI ( 68.9 bar )
  • Filtration efficiency: 99.9999999%
  • Filtration accuracy: > = 0.0015 µm
  • Gas flow rates: 1 – 200,000 pm
  • Target impurities: moisture, particles, oxygen, CO2, CO, and many others
  • Shape: square, sheet, cylinder
  • Housing material: stainless steel, Hastelloy

Note: specifications listed above are for reference only, to know more information, please consult Filson. ( Custom Options Also Available )

Filson Semiconductor Gas Filters Application:

  • Process gas filtration
  • Wafer production
  • Trace moisture detection
  • Ultrapure water
  • Wet etch and cleans
  • Micro-electromechanical systems (MEMS)
  • Data storage devices
  • Microelectronics for computers, cell phones, and control devices

Filson Filters for Semiconductor Applications

Filson Filters for Semiconductor Applications


People Also Ask

What are Filters in Semiconductor?

Filters in semiconductors indicate gas filters applied to semiconductor manufacturing. The filter plays the important role in protecting expensive components in the gas purification system. Besides, it contributes a lot to filter gas used in the manufacturing process.

The semiconductor gas filter is designed and engineered into different shapes including sheet, square, and cylinder to meet customer specifications and match with the existing system requirements.

Semiconductor gas filter produced by Filson is generally made of metal materials experiencing a sintering process. You can select desired materials from stainless steel, nickel, and Hastelloy to satisfy your needs. Of course, other metal materials are also available to build filters for you.

Filson Semiconductor Gas Filters

Filson Semiconductor Gas Filters

What are the Differences Between PTFE Membrane Filter and Metal Filter?

You may find that most semiconductor gas filters in the market are white and are made of PTFE, nylon, or nanospun polypro. But here, at Filson, we only provide metal filters for your semiconductor devices.

There are many differences between PTFE membrane filter and metal filter, the main points are listed below:

  • About price.

PTFE membrane filter is fairly cheap, while semiconductor metal filter is relatively expensive compared to the former one. That’s typical because of the raw construction materials.

  • About quality.

PTFE membrane filter is far thinner than most manufacturers realize and can be torn during the operation process due to pressure fluctuation. When the thin filter becomes damaged, particle excursion happens and it will result in downstream process failures and contamination of the high purity gas.

However, the semiconductor metal filter wins this round. Regardless of the quality of raw metal materials, the metal filter is sintered of metal powder which has already ensured the compact construction of the product. And no powder drop means no new contaminants to the system.

  • About performance.

For most manufacturers, the standard practice is to use PTFE membrane filters in semiconductor manufacturing, because they have low-pressure drops and they are quite cheap. Metal filters are featured by high temperature and pressure resistance and they are more accurate infiltration which can remove particles of 0.0015 µm.

  • About life.

Though PTFE membrane filters are lower in price, their lives are incredibly short-lived. They take the risk of tearing and shedding which makes it necessary to change out within one year. If you purchase multiple PTFE filters in a short time, it seems not cost-effective.

In terms of metal filters, they have a much longer lifetime than PTFE filters. Even when being exposed to the most corrosive gas in semiconductor manufacturing, they can last up to five years. At the same time, they can perform well under oxidizing conditions due to the strong structure and good properties of materials.

You can choose the proper semiconductor filter for your application according to the points above. But it is obvious that a metal filter is more efficient and economical. The stable and reliable alternative to these risks brought by PTFE filters is sintered metal filters. Though they cost a bit more than PTFE filters, the benefits of metal filters go far beyond their face value.

Sintered Metal Filter vs PTFE Filter

Sintered Metal Filter vs PTFE Filter

What are the Benefits of Using a Semiconductor Gas Filter?

When applying a semiconductor gas filter to your industry, you will find your semiconductors yields increased and the operation of the whole process becomes smooth and successful.

  • Highest possible flow rate with the smallest available footprint
  • Specially designed for integrated gas system to provide spatial effectiveness for the customer
  • Easy cleaning and installation to save time
  • Remarkable gas filter providing a system with superior protection
  • Maximized site performance by eliminating defects and increasing yields
  • No gas leakage, no metal powder drop, no secondary pollution

When you buy a Filson semiconductor gas filter, you are buying the peace of mind and high profits of your business. Trust Filson’s professional competence and contact us today for a quick quote.

Excellent Gas Filter for Semiconductor

Excellent Gas Filter for Semiconductor

How to Choose the Correct Semiconductor Gas Filter?

When it comes to choosing the right semiconductor gas filter for your application, you should pay more attention to the following factors:

  • Gas being purified
  • Operating pressure ( psi ) and operating temperature ( °C )
  • Impurities in the gas and their concentrations ( ppm )
  • Impurities to remove and to what concentrations ( ppm )
  • Gas flow rate ( average flow rate ) ( slpm )
  • Duty cycle ( % usage )
  • Inlet and outlet fitting type and size
  • Integral particle filtration desired
  • Construction materials

Send the specifications directly to Filson and we are always ready to face your difficult gas filtration challenges and projects. If you do not know exactly about the information above, you can also contact Filson for assistance.

Choose the Right Filter for Your Application

Choose the Right Filter for Your Application

Why Should I Use a Semiconductor Gas Filter? Is it Necessary?

Of course, it’s necessary to adopt a semiconductor gas filter in your application.

Semiconductors are the basis of most electronic circuits. And they exist in almost all electronic devices. The manufacturing of these integrated circuits, which is also called chips, is a complex design system, leading to a multi-step process.

The point is that the chips yield of these processes depends heavily on the effectiveness of semiconductor gas filters used in every step of wafer processing. The filter captures particulate matter during the operating process to a great extent which makes sure the final success.

High purity gases in multiple forms are used to create and clean semiconductor chips. They are transferred through a delivery system to silicon wafers through the existing gas filter. Because of the demanding requirements for the gas, the filter must perform well to guarantee the final product quality.

Since it is crucial to maintain a clean system free of contaminants, it is indispensable to use a gas filter in your semiconductor industry.

Use Gas Filter to Improve Semiconductor Industry

Use Gas Filter to Improve Semiconductor Industry

How to Clean Semiconductor Gas Filters?

Like any other sintered metal filters, semiconductor gas filters’ regenerative cleaning can be done by physical and chemical methods:

Physical methods:

  • Clean liquid backwash
  • Clean gas backwash
  • Ultrasonic method of cleaning

Chemical methods:

  1. Dilute acids
  2. Dilute alkalis
  3. Oxidizers
  4. Surfactants
  5. Enzymes and other cleaning agents

You are recommended to clean your gas filter regularly to keep its effect. The above methods can also be used interchangeably. But remember to choose the proper method according to the actual conditions. If you have any doubt, please contact Filson.

Stainless Steel Gas Filter Cleaning with Ultrasonics

Stainless Steel Gas Filter Cleaning with Ultrasonic

Need any help? Looking for an ideal semiconductor gas filter? Do contact Filson TODAY:

Tel: 86 – 157 3695 8886

Email: [email protected]

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